Facilities

 

ALD reactor

Our ALD reactor

Mid and Far IR bench

FTIR bench

 

Spectroscopic Ellipsometer:

Spectroscopic Ellipsometer

Stylus Profilometer

Tencor Profilometer

Probe station and electronics

Probe station Probe station electronics

Sputtering chamber

Sputtering system

UMBC Physics Facilities we use:

Atomic Force Microscope:

Atomic Force Microscope

SEM and sample preparation:

 

SEM sample preparation